Nanotechnology

The Departmental program in Nanotechnology is concerned with the mechanical and electronic properties of nanometer scale systems as well as macroscopic systems that require nanometer tolerances in fabrication, control, and measurement.

Design and manufacturing of such systems for optical, mechanical, fluidic, and electronic applications is a principle focus of this research group. Activities include development of micro-electro-mechanical systems (MEMS), nano-electro-mechanical systems (NEMS), ultraprecision machining technologies, process control for advanced manufacturing systems, mechanics of submicron devices, and computational modeling.

The group works closely with the Boston University Photonics Center, Physics Department, and with the Fraunhoffer Institute. Their activities span all four departments in the College of Engineering.

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