Optoelectronic Processing Facility
The Optoelectronic Processing Facility is a multi-user cleanroom outfitted with advanced equipment for fabricating semiconductor and optoelectronic devices on a wafer to die level. The 2500 square foot facility includes both Class 100 photolithography room and Class 1000 Cleanroom. In the Class 1000 cleanroom, capabilities include wet chemical processing, dry etching process, thin film Physical Vapor Deposition (including thermal oxidation and annealing), metrology, dicing saw and wire bonding. To view the OPF Lab Hood safety training, please click the following link: OPF Laboratory Hood Safety Training. The password can be obtained from the OPF lab manager.
Report an equipment problem here.
Sign up for training here.
Address: 8 Saint Mary’s St., Room 816, Boston, MA 02215
Contact: Paul Mak, pmak@bu.edu, Tel: (617) 353-8869
Class 100 Photolithography Cleanroom |
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Instrument | Make | Model and SOP |
Photoresist Spinner Hood | Headway Research | CB-15 & PWM32 |
Spinner/Hotplate System | Karl Suss | Delta 80T2/200 |
Mask Aligner | Karl Suss | MA6 |
Microscope System w/Video Measuring | Nikon | Optiphot LV150 |
Maskless Aligner | Heidelberg Instruments | MLA_SOP |
Wet Bench | Salare | WPB-1500 |
Nano Imprinter Lithography | Nanonex | NX-B200 |
UV Flood Exposure | Newport | 69910 & 97434-1000 |
Class 1000 Cleanroom |
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Thin Film Deposition and Analysis Equipment |
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Instrument | Make | Model | Training Video |
Thermal Evaporator | Edwards | Auto 306 Turbo | Coming Soon |
Electron Beam and Thermal Evaporator | CHA | Solution | Coming Soon |
Thermal Oxide Furnace | MRL Industries | HT 1012 | Coming Soon |
DC/RF Magnetron Sputter | Denton Vacuum | Discovery 18 | Coming Soon |
Electron Beam Evaporator | Angstrom Engineering | EVOVAC | Coming Soon |
Rapid Thermal Processor | Modular Process Technology | RTP-600S | Coming Soon |
Surface Profiler | KLA Tencor | Alpha Step 500 | Coming Soon |
Spectroscopic Ellipsometer | J.A. Woollam | V-Vase | Coming Soon |
CVD Furnace | Mellen | Split Tube | N/A |
Surface Profiler | Veeco | Dektak8 | Coming Soon |
Rapid Thermal Processor | Allwin21 | AccuThermo AW 610M | Coming Soon |
Reflectometry | Filmetrics | F40-UVX | Available |
Plasma Etching and Cleaning |
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Instrument | Make | Model | Training Video |
Reactive Ion Etcher | Plasma-Therm | 790 | Coming Soon |
Plasma Asher | PVA TePla America | M4L | Coming Soon |
Wet Bench | Salare | WPB-1800 | N/A |
Crticial Point Dryer | Tousimis | Tousimis Autosamdri – 815 | N/A |
Wirebonding and Electrical Testing |
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Instrument | Make | Model | Training Video |
Ball Bonder | Kulicke & Soffa | 4124 | Coming Soon |
Wedge Bonder | Kulicke & Soffa | 4523 | N/A |
Post Processing Equipment |
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Instrument | Make | Model | Training Video |
Manual Scriber | Karl Suss | HR100 | N/A |
Stereo Microscope | Nikon | SMZ800 | N/A |
Dicing Saw | Disco Dad | 3220 | Available |