Optoelectronic Processing Facility


The Optoelectronic Processing Facility is a multi-user cleanroom outfitted with state-of-the-art equipment for fabricating semiconductor and optoelectronic devices on a wafer to die level. The 2500 square foot facility includes both Class 100 photolithography room and Class 1000 Cleanroom. In the Class 1000 cleanroom, capabilities include wet chemical processing, thin film deposition (including thermal oxidation and annealing), plasma etching and cleaning, and electrical testing after wirebonding. To view the OPF Lab Hood safety training, please click the following link: OPF Laboratory Hood Safety Training.  The password can be obtained from the OPF lab manager.

Address: 8 Saint Mary’s St., Room 816, Boston, MA 02215
Lab Manager: Paul Mak, pmak@bu.edu, Tel: (617) 353-8869

Class 100 Photolithography Cleanroom

Instrument Make Model
Photoresist Spinner Hood Headway Research CB-15 & PWM32
Spinner/Hotplate System Karl Suss Delta 80T2/200
Mask Aligner Karl Suss MA6
Microscope System w/Video Measuring Nikon Optiphot LV150 
Laser Mask Writer Heidelberg DWL66
Wet Bench Salare WPB-1500

Thin Film Deposition and Analysis Equipment

Instrument Make Model
Thermal Evaporator Edwards Auto 306 Turbo
Electron Beam Evaporator Edwards Auto 306 Cyro
Electron Beam and Thermal Evaporator CHA Solution
Thermal Oxide Furnace MRL Industries HT 1012
DC/RF Magnetron Sputter Denton Vacuum Discovery 18
Electron Beam Evaporator Angstrom Engineering EVOVAC
Rapid Thermal Processor Modular Process Technology RTP-600S
Ellipsometer Rudolph Auto EL-II
Surface Profiler KLA Tencor Alpha Step 500
Spectroscopic Ellipsometer J.A. Woollam V-Vase

Plasma Etching and Cleaning

Instrument Make Model
Reactive Ion Etcher Plasma-Therm 790 
Plasma Asher PVA TePla America M4L
ICP Deep Reactive Ion Etcher Surface Technology Systems ASE HRM
Wet Bench Salare WPB-1800
HF Vapor Etcher AMMT HF VE6 

Wirebonding and Electrical Testing

Instrument Make Model
Ball Bonder Kulicke & Soffa 4124
Wedge Bonder Kulicke & Soffa 4523
Impedance Analyzer Solartron Analytical 1260A
Lock-In Amplifier Signal Recovery 7280
Probe Station Karl Suss PM5
Semiconductor Parameter Analyzer HP 4155A
Precision LCR Meter HP 4284A
4 Point Probe Cascade Microtech CPS-05

Post Processing Equipment

Instrument Make Model
Manual Scriber Karl Suss HR100
Stereo Microscope Nikon SMZ800 
Dicing Saw Disco Dad 3220