Boston University, Intune Networks create BURST network
Boston University and Intune Networks have formed a partnership to create a...
Optoelectronic Processing Facility
The Optoelectronic Processing Facility is a multi-user cleanroom outfitted with state-of-the-art equipment for fabricating semiconductor and optoelectronic devices on a wafer to die level. The facility includes both a Class 100 photolithography room and a Class 1000 Cleanroom. In the Class 1000 cleanroom, capabilities include wet chemical processing, thin film deposition (including thermal oxidation and annealing), plasma etching and cleaning, and electrical testing after wirebonding.
Address: 8 Saint Mary’s St., Room 816, Boston, MA 02215, Tel: (617) 358-2017
Lab Manager: Mr. Paul Mak, pmak@bu.edu
Class 100 Photolithography Cleanroom |
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| Instrument | Make | Model |
| Photoresist Spinner Hood | Headway Research | CB-15 & PWM32 |
| Spinner/Hotplate System | Karl Suss | Delta 80T2/200 |
| Mask Aligner | Karl Suss | MJB3 |
| Mask Aligner | Karl Suss | MA6 |
| Microscope System w/Video Measuring | Nikon | Optiphot 150S |
| Laser Mask Writer | Heidelberg | DWL66 |
| Wet Bench | Salare | WPB-1500 |
Thin Film Deposition and Analysis Equipment |
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| Instrument | Make | Model |
| Thermal Evaporator | BOC Edwards | Auto 306 Turbo |
| Electron Beam Evaporator | BOC Edwards | Auto 306 Turbo |
| Electron Beam and Thermal Evaporator | CHA | Solution |
| Thermal Oxide Furnace | MRL Industries | HT 1012 |
| DC/RF Magnetron Sputter | Denton Vacuum | Discovery 18 |
| Electron Beam Evaporator | Sharon Vacuum | Custom Designed |
| Rapid Thermal Processor | Modular Process Technology | RTP-600S |
| Ellipsometer | Rudolph | Auto EL-II |
| Surface Profiler | KLA Tencor | Alpha Step 500 |
| Spectroscopic Ellipsometer | Woollam | V-Vase |
Plasma Etching and Cleaning |
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| Instrument | Make | Model |
| Reactive Ion Etcher | Plasma-Therm | 790 |
| Plasma Asher | PVA TePla America | M4L |
| ICP Deep Reactive Ion Etcher | Surface Technology Systems | ASE HRM |
| Wet Bench | Salare | WPB-1800 |
| HF Vapor Etcher | AMMT | HFVE6 |
Wirebonding and Electrical Testing |
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| Instrument | Make | Model |
| Ball Bonder | Kulicke & Soffa | 4124 |
| Wedge Bonder | Kulicke & Soffa | 4523 |
| Probe Station | Karl Suss | PM5 |
| Semiconductor Parameter Analyzer | HP | 4155A |
| Precision LCR Meter | HP | 4284A |
| 4 Point Probe | Cascade Microtech | CPS-05 |
Post Processing Equipment |
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| Instrument | Make | Model |
| Manual Scriber | Karl Suss | HR100 |
| Stereo Microscope | Nikon | SMZ-800 |
| Microscope | Leitz | Metalloplan |
| Dicing Saw | Dicing Technology | Basic-Dice II |