Optoelectronic Processing Facility

The Optoelectronic Processing Facility is a multi-user cleanroom outfitted with advanced equipment for fabricating semiconductor and optoelectronic devices on a wafer to die level. The 2500 square foot facility includes both Class 100 photolithography room and Class 1000 Cleanroom. In the Class 1000 cleanroom, capabilities include wet chemical processing, dry etching process, thin film Physical Vapor Deposition (including thermal oxidation and annealing), metrology, dicing saw and wire bonding. To view the OPF Lab Hood safety training, please click the following link: OPF Laboratory Hood Safety Training. The password can be obtained from the OPF lab manager.

Report an equipment problem here.

Sign up for training here.

Address: 8 Saint Mary’s St., Room 816, Boston, MA 02215

  • For Class 100 Cleanroom – Rajendra Dulal, rdulal@bu.edu, Tel: (617) 353-9044
  • For Class 1000 Cleanroom – Paul Mak, pmak@bu.edu, Tel: (617) 353-8869

Class 100 Photolithography Cleanroom

Instrument Make Model Contact
Photoresist Spinner Hood Headway Research CB-15 & PWM32 Rajendra Dulal
Spinner/Hotplate System Karl Suss Delta 80T2/200 Rajendra Dulal
Mask Aligner Karl Suss MA6 Rajendra Dulal
Microscope System w/Video Measuring Nikon Optiphot LV150  Rajendra Dulal
Laser Mask Writer Heidelberg DWL66 Rajendra Dulal
Wet Bench Salare WPB-1500 Rajendra Dulal
Nano Imprinter Lithography Nanonex NX-B200 Rajendra Dulal
UV Flood Exposure Newport 69910 & 97434-1000 Rajendra Dulal


Class 1000 Cleanroom

Thin Film Deposition and Analysis Equipment

Instrument Make Model Contact Training Video
Thermal Evaporator Edwards Auto 306 Turbo Paul Mak Coming Soon
Electron Beam and Thermal Evaporator CHA Solution Paul Mak Coming Soon
Thermal Oxide Furnace MRL Industries HT 1012 Paul Mak Coming Soon
DC/RF Magnetron Sputter Denton Vacuum Discovery 18 Paul Mak Coming Soon
Electron Beam Evaporator Angstrom Engineering EVOVAC Paul Mak Coming Soon
Rapid Thermal Processor Modular Process Technology RTP-600S Paul Mak Coming Soon
Surface Profiler KLA Tencor Alpha Step 500 Paul Mak Coming Soon
Spectroscopic Ellipsometer J.A. Woollam V-Vase Paul Mak Coming Soon
CVD Furnace Mellen Split Tube Paul Mak N/A
Surface Profiler Veeco Dektak8 Paul Mak Coming Soon
Reflectometry Filmetrics F40-UVX Paul Mak Coming Soon

Plasma Etching and Cleaning

Instrument Make Model Contact Training Video
Reactive Ion Etcher Plasma-Therm 790  Paul Mak Coming Soon
Plasma Asher PVA TePla America M4L Paul Mak Coming Soon
Wet Bench Salare WPB-1800 Paul Mak N/A
Crticial Point Dryer Tousimis Tousimis Autosamdri – 815 Paul Mak N/A

Wirebonding and Electrical Testing

Instrument Make Model Contact Training Video
Ball Bonder Kulicke & Soffa 4124 Paul Mak Coming Soon
Wedge Bonder Kulicke & Soffa 4523 Paul Mak N/A

Post Processing Equipment

Instrument Make Model Contact Training Video
Manual Scriber Karl Suss HR100 Paul Mak N/A
Stereo Microscope Nikon SMZ800  Paul Mak N/A
Dicing Saw Disco Dad 3220 Paul Mak Available