Optoelectronic Processing Facility
The Optoelectronic Processing Facility is a multi-user cleanroom outfitted with advanced equipment for fabricating semiconductor and optoelectronic devices on a wafer to die level. The 2500 square foot facility includes both Class 100 photolithography room and Class 1000 Cleanroom. In the Class 1000 cleanroom, capabilities include wet chemical processing, dry etching process, thin film Physical Vapor Deposition (including thermal oxidation and annealing), metrology, dicing saw and wire bonding. To view the OPF Lab Hood safety training, please click the following link: OPF Laboratory Hood Safety Training. The password can be obtained from the OPF lab manager.
Report an equipment problem here.
Sign up for training here.
Address: 8 Saint Mary’s St., Room 816, Boston, MA 02215
Lab Manager: Paul Mak, pmak@bu.edu, Tel: (617) 353-8869
Class 100 Photolithography Cleanroom |
|||
Equipment Status | Instrument | Make | Model |
---|---|---|---|
Up | Photoresist Spinner Hood | Headway Research | CB-15 & PWM32 |
Up | Spinner/Hotplate System | Karl Suss | Delta 80T2/200 |
Up | Mask Aligner | Karl Suss | MA6 |
Up | Microscope System w/Video Measuring | Nikon | Optiphot LV150 |
UP | Laser Mask Writer | Heidelberg | DWL66 |
Up | Wet Bench | Salare | WPB-1500 |
Up | Nano Imprinter Lithography | Nanonex | NX-B200 |
Up | UV Flood Exposure | Newport | 69910 & 97434-1000 |
Thin Film Deposition and Analysis Equipment |
|||
Equipment Status | Instrument | Make | Model |
Up | Thermal Evaporator | Edwards | Auto 306 Turbo |
Decommission | Electron Beam Evaporator | Edwards | Auto 306 Turbo |
Up | Electron Beam and Thermal Evaporator | CHA | Solution |
Up | Thermal Oxide Furnace | MRL Industries | HT 1012 |
Up | DC/RF Magnetron Sputter | Denton Vacuum | Discovery 18 |
Up | Electron Beam Evaporator | Angstrom Engineering | EVOVAC |
Up | Rapid Thermal Processor | Modular Process Technology | RTP-600S |
Decommission | Ellipsometer | Rudolph | Auto EL-II |
Up | Surface Profiler | KLA Tencor | Alpha Step 500 |
Up | Spectroscopic Ellipsometer | J.A. Woollam | V-Vase |
Up | CVD Furnace | Mellen | Split Tube |
Plasma Etching and Cleaning |
|||
Equipment Status | Instrument | Make | Model |
Up | Reactive Ion Etcher | Plasma-Therm | 790 |
Up | Plasma Asher | PVA TePla America | M4L |
Up | ICP Deep Reactive Ion Etcher | Surface Technology Systems | ASE HRM |
Up | Wet Bench | Salare | WPB-1800 |
Decommission | HF Vapor Etcher | AMMT | HF VE6 |
Up | Crticial Point Dryer | Tousimis | Tousimis Autosamdri – 815 |
Wirebonding and Electrical Testing |
|||
Instrument | Make | Model | |
Up | Ball Bonder | Kulicke & Soffa | 4124 |
Up | Wedge Bonder | Kulicke & Soffa | 4523 |
Up | Impedance Analyzer | Solartron Analytical | 1260A |
Up | Lock-In Amplifier | Signal Recovery | 7280 |
Up | Probe Station | Karl Suss | PM5 |
Up | Semiconductor Parameter Analyzer | HP | 4155A |
Up | Precision LCR Meter | HP | 4284A |
Decommission | 4 Point Probe | Cascade Microtech | CPS-05 |
Post Processing Equipment |
|||
Equipment Status | Instrument | Make | Model |
Up | Manual Scriber | Karl Suss | HR100 |
Up | Stereo Microscope | Nikon | SMZ800 |
Up | Dicing Saw | Disco Dad | 3220 |