Zeiss Supra 40-VP high vacuum FE-SEM

Zeiss Supra 40-VP FE-SEM is a scanning electron microscope (SEM) with a field-emission electron gun (FEG) that enables it to reach from micron to nanoscale resolutions. This equipment is solely dedicated to Electron Beam Lithography using Nanometer Pattern Generating System (NPGS) and is equipped with a Secondary Electron Everhart-Thorney (ET) detector, an in-lens detector, and a Robinson back scattered detector.