MEMS: Fabrication and Materials
ENG MS 555
This course will explore the world of microelectromechanical devices and systems (MEMS). This requires an awareness of design, fabrication, and material issues involved in MEMS. The material will be covered through a combination of lectures, case studies, and individual homework assignments. The course will cover design, fabrication technologies, material properties, structural mechanics, basic sensing and actuation principles, packaging, and MEMS markets and applications. The course will emphasize MEMS fabrication and materials. Same as ENG ME 555. Students may not receive credits for both.
SPRG 2023 Schedule
|A1||Zhang||WED 210||MW 8:00 am-9:45 am|
Note that this information may change at any time. Please visit the Student Link for the most up-to-date course information.