MEMS: Fabrication and Materials

ENG ME 555

This course will explore the world of microelectromechanical systems (MEMS) and NEMS. This requires an awareness of design, fabrication, and materials issues involved in micro/nanosystems. We will go over this through a combination of lectures, case studies, and individual homework assignments. The course will cover fabrication technologies, material properties, structural mechanics, basic sensing and actuation principles, packaging, and MEMS markets and applications. The course will emphasize the fabrication and materials of micro/nanosystems. This is not because the other parts aren't important. Instead, it is because with fabrication and materials expertise there is something concrete you can do that will always help. When we exam special topics and case studies, a lot of these other pieces will be put together. Same as ENG MS 555. Students may not receive credit for both.

SPRG 2023 Schedule

Section Instructor Location Schedule Notes
A1 Zhang PHO 202 MW 8:00 am-9:45 am

Note that this information may change at any time. Please visit the Student Link for the most up-to-date course information.