Optoelectronic Processing Facility (OPF)

The Optoelectronic Processing Facility (OPF) is a shared laboratory spanning over 2,500 square feet, focused on fabricating optoelectronic and photonic devices. The facility houses equipment for thin film deposition, photolithography, wet and dry chemical processing, plasma etching and cleaning, metallization, thermal oxidation and annealing, wire bonding, and electrical characterization. Recent equipment acquisitions have substantially improved the facility’s etching and optical lithography capabilities.

The OPF is one of the shared laboratories supporting Boston University’s photonics research community, which spans the Biology, Biomedical Engineering, Chemistry, Electrical & Computer Engineering, Materials Science & Engineering, Mechanical Engineering, Medicine, Physics, and Psychological & Brain Sciences departments.