MEMS: Fabrication and Materials

ENG MS 555

This course will explore the world of microelectromechanical devices and systems (MEMS). This requires an awareness of design, fabrication, and material issues involved in MEMS. The material will be covered through a combination of lectures, case studies, and individual homework assignments. The course will cover design, fabrication technologies, material properties, structural mechanics, basic sensing and actuation principles, packaging, and MEMS markets and applications. The course will emphasize MEMS fabrication and materials. Meets with ENGME555. Students may not receive credit for both.

FALL 2013 Schedule

Section Instructor Location Schedule Notes
A1 Zhang SAR 300 MW 2:00 pm-4:00 pm Mts w/ ME555 A1
and ME555 Dl

Note that this information may change at any time. Please visit the Student Link for the most up-to-date course information.