{"id":94,"date":"2011-02-04T14:01:56","date_gmt":"2011-02-04T19:01:56","guid":{"rendered":"https:\/\/www.bu.edu\/photonics\/research\/opf\/"},"modified":"2026-06-02T11:24:04","modified_gmt":"2026-06-02T15:24:04","slug":"opf","status":"publish","type":"page","link":"https:\/\/www.bu.edu\/photonics\/sharedfacilities\/opf\/","title":{"rendered":"Optoelectronic Processing Facility (OPF)"},"content":{"rendered":"

\"\"The Optoelectronic Processing Facility is a multi-user cleanroom outfitted with advanced equipment for fabricating semiconductor and optoelectronic devices on a wafer to die level. The 2500 square foot facility includes both Class 100 photolithography room and Class 1000 Cleanroom. In the Class 1000 cleanroom, capabilities include wet chemical processing, dry etching process, thin film Physical Vapor Deposition (including thermal oxidation and annealing), metrology, dicing saw and wire bonding. To view the OPF Lab Hood safety training, please click the following link: OPF Laboratory Hood Safety Training<\/a>. The password can be obtained from the OPF lab manager.<\/p>\n

To access our facilities online management (FOM) system, visit https:\/\/pho-core.bu.edu\/fom\/<\/a>.
\nTo request cardkey access to our facilities, visit:\u00a0<\/span>https:\/\/ccure<\/span>-portal.bu.edu\/ccure<\/span>portal\/login<\/a><\/span>
\nReport an equipment problem here<\/a>.
\nSign up for training here<\/a>.<\/p>\n

Address:<\/strong> 8 Saint Mary’s St., Room 816, Boston, MA 02215
\nContact: <\/strong>Paul Mak, pmak@bu.edu<\/a>, Tel: (617) 353-8869<\/p>\n

\n\n\n\n\n\n\n\n\n\n\n\n\n
\n

Class 100 Photolithography Cleanroom<\/h3>\n<\/td>\n<\/tr>\n

Instrument
\nMake and Model<\/strong><\/td>\n		SOP and Training Videos<\/strong><\/td>\nContact<\/strong><\/td>\n<\/tr>\n
Photoresist Spinner Hood
\nHeadway Research<\/a> CB-15 & PWM32<\/td>\n		SOP<\/a><\/td>\nArthur Shih<\/td>\n<\/tr>\n
Spinner\/Hotplate System
\nKarl Suss<\/a> Delta 80T2\/200<\/td>\n		SOP<\/a><\/td>\nArthur Shih<\/td>\n<\/tr>\n
Mask Aligner
\nKarl Suss<\/a> MA6<\/td>\n		SOP<\/a><\/td>\nArthur Shih<\/td>\n<\/tr>\n
Microscope System
\nNikon<\/a> Optiphot LV150<\/td>\n		SOP<\/a><\/td>\nArthur Shih<\/td>\n<\/tr>\n
Maskless Aligner
\nHeidelberg Instruments<\/a> MLA 150<\/td>\n		SOP<\/a>
\n<\/span>User_manual<\/a><\/td>\n		Arthur Shih<\/td>\n<\/tr>\n
Wet Bench
\nSalare<\/a> WPB-1500<\/td>\n		SOP<\/a><\/td>\nArthur Shih<\/td>\n<\/tr>\n
UV Flood Exposure
\nNewport<\/a> 69910 & 97434-1000<\/td>\n		SOP<\/a><\/td>\nArthur Shih<\/td>\n<\/tr>\n
Nanoimprinter
\nNanoNex<\/a> NX-B200<\/td>\n		SOP<\/a><\/td>\nArthur Shih<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\n

Class 1000 Cleanroom<\/h3>\n<\/th>\n<\/tr>\n

\n

<\/h4>\n

Thin Film Deposition and Analysis Equipment<\/h4>\n<\/td>\n<\/tr>\n

Instrument<\/strong><\/td>\nSOP and Training Videos<\/strong><\/td>\nContact<\/strong><\/td>\n<\/tr>\n
Electron Beam and Thermal Evaporator
\nCHA<\/a> Solution<\/a><\/td>\n		SOP<\/a><\/td>\nPaul Mak<\/td>\n<\/tr>\n
Thermal Evaporator
\nAngstrom Engineering COVAP<\/a><\/td>\n		SOP<\/a><\/td>\nPaul Mak<\/td>\n<\/tr>\n
Thermal Oxide Furnace
\nMRL Industries<\/a> HT 1012<\/a><\/td>\n		SOP<\/a><\/td>\nPaul Mak<\/td>\n<\/tr>\n
DC\/RF Magnetron Sputter
\nDenton Vacuum<\/a> Discovery 18<\/a><\/td>\n		SOP<\/a><\/td>\nPaul Mak<\/td>\n<\/tr>\n
Electron Beam Evaporator
\nAngstrom Engineering<\/a> EVOVAC<\/a><\/td>\n		SOP<\/a><\/td>\nPaul Mak<\/td>\n<\/tr>\n
Surface Profiler
\nKLA Tencor<\/a> Alpha Step 500<\/a><\/td>\n		SOP<\/a><\/td>\nPaul Mak<\/td>\n<\/tr>\n
Spectroscopic Ellipsometer
\nJ.A. Woollam<\/a> V-Vase<\/a><\/td>\n		SOP<\/a><\/td>\nArthur Shih
\nPaul Mak<\/td>\n<\/tr>\n
CVD Furnace
\nMellen<\/a> Split Tube<\/td>\n		Contact Lab Manager<\/td>\nPaul Mak<\/td>\n<\/tr>\n
Rapid Thermal Processor
\nAllwin21<\/a> AccuThermo AW 610M<\/a>
\n<\/span><\/td>\n		SOP<\/a><\/td>\nPaul Mak<\/td>\n<\/tr>\n
Reflectometry
\nFilmetrics<\/a> F40-UVX
\n<\/span><\/td>\n		SOP<\/a>
\nTraining Video<\/a><\/td>\n		Paul Mak<\/td>\n<\/tr>\n
Surface Profiler<\/span>
\nBruker Dektak Pro<\/a><\/td>\n		Contact Lab Manager<\/td>\nPaul Mak<\/td>\n<\/tr>\n
\n

<\/h4>\n

Plasma Etching and Cleaning<\/h4>\n<\/td>\n<\/tr>\n

Instrument<\/th>\nSOP and Training Videos<\/strong><\/th>\nContact<\/strong><\/th>\n<\/tr>\n
Plasma Asher
\nPVA TePla America<\/a> M4L<\/a><\/td>\n		SOP<\/a><\/td>\nPaul Mak
\nArthur Shih<\/td>\n<\/tr>\n
Wet Bench
\nSalare<\/a> WPB-1800<\/a><\/td>\n		SOP<\/a><\/td>\nPaul Mak<\/td>\n<\/tr>\n
Critical Point Dryer
\nTousimis<\/a> Tousimis Autosamdri – 815<\/a><\/td>\n		SOP<\/a><\/td>\nPaul Mak<\/td>\n<\/tr>\n
Reactive Ion Etcher
\nPlasma-Therm<\/a> 790\u00a0<\/a><\/a><\/td>\n		SOP<\/a><\/td>\nPaul Mak<\/td>\n<\/tr>\n
Reactive Ion Etcher
\nOxford PlasmaPro 100 Cobra ICP RIE<\/a><\/td>\n		Contact Lab Manager<\/td>\nPaul Mak
\nArthur Shih<\/td>\n<\/tr>\n
Deep Reactive Ion Etcher
\nOxford PlasmaPro 100 Estrelas DRIE<\/a><\/td>\n		Contact Lab Manager<\/td>\nArthur Shih
\nPaul Mak<\/td>\n<\/tr>\n
\n

Wirebonding and Electrical Testing<\/h4>\n<\/td>\n<\/tr>\n

Instrument<\/th>\nSOP and Training Videos<\/strong><\/th>\nContact<\/strong><\/th>\n<\/tr>\n
Ball Bonder
\nKulicke & Soffa 4124<\/a><\/td>\n		SOP<\/a>
\nTraining Video<\/a><\/td>\n		Paul Mak<\/td>\n<\/tr>\n
Wedge Bonder
\nKulicke & Soffa<\/a> 4523<\/a><\/td>\n		SOP<\/a><\/td>\nPaul Mak<\/td>\n<\/tr>\n
\n

<\/h4>\n

Post Processing Equipment<\/h4>\n<\/td>\n<\/tr>\n

Instrument<\/th>\nSOP and Training Videos<\/strong><\/th>\nContact<\/strong><\/th>\n<\/tr>\n
Manual Scriber
\nKarl Suss<\/a> HR100<\/a><\/span><\/td>\n		<\/td>\nPaul Mak<\/td>\n<\/tr>\n
Nanoscribe
\nPPGT2<\/a><\/td>\n		Contact Lab Manager<\/td>\nPaul Mak<\/td>\n<\/tr>\n
Stereo Microscope
\nNikon SMZ800\u00a0<\/a><\/span><\/td>\n		SOP<\/a><\/td>\nPaul Mak<\/td>\n<\/tr>\n
Dicing Saw
\nDisco Dad<\/a> 3220<\/a><\/span><\/td>\n		Training Video<\/a><\/span><\/td>\nPaul Mak<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n","protected":false},"excerpt":{"rendered":"

The Optoelectronic Processing Facility is a multi-user cleanroom outfitted with advanced equipment for fabricating semiconductor and optoelectronic devices on a wafer to die level. The 2500 square foot facility includes both Class 100 photolithography room and Class 1000 Cleanroom. In the Class 1000 cleanroom, capabilities include wet chemical processing, dry etching process, thin film Physical […]<\/p>\n","protected":false},"author":1963,"featured_media":0,"parent":96,"menu_order":5,"comment_status":"closed","ping_status":"closed","template":"","meta":[],"_links":{"self":[{"href":"https:\/\/www.bu.edu\/photonics\/wp-json\/wp\/v2\/pages\/94"}],"collection":[{"href":"https:\/\/www.bu.edu\/photonics\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.bu.edu\/photonics\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.bu.edu\/photonics\/wp-json\/wp\/v2\/users\/1963"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bu.edu\/photonics\/wp-json\/wp\/v2\/comments?post=94"}],"version-history":[{"count":52,"href":"https:\/\/www.bu.edu\/photonics\/wp-json\/wp\/v2\/pages\/94\/revisions"}],"predecessor-version":[{"id":15200,"href":"https:\/\/www.bu.edu\/photonics\/wp-json\/wp\/v2\/pages\/94\/revisions\/15200"}],"up":[{"embeddable":true,"href":"https:\/\/www.bu.edu\/photonics\/wp-json\/wp\/v2\/pages\/96"}],"wp:attachment":[{"href":"https:\/\/www.bu.edu\/photonics\/wp-json\/wp\/v2\/media?parent=94"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}