{"id":36821,"date":"2021-12-15T01:35:11","date_gmt":"2021-12-15T05:35:11","guid":{"rendered":"https:\/\/www.bu.edu\/cise\/?post_type=research&#038;p=36821"},"modified":"2022-07-15T01:36:56","modified_gmt":"2022-07-15T05:36:56","slug":"reflection-mode-computational-3d-phase-and-polarization-imaging-for-semiconductor-wafer-metrology-and-inspection","status":"publish","type":"research","link":"https:\/\/www.bu.edu\/cise\/research\/reflection-mode-computational-3d-phase-and-polarization-imaging-for-semiconductor-wafer-metrology-and-inspection\/","title":{"rendered":"Reflection-mode Computational 3D Phase and Polarization Imaging for Semiconductor Wafer Metrology and Inspection"},"content":{"rendered":"<p style=\"font-weight: 400;\">The goal of this project is to prototype a reflection-mode computational microscope to 1) provide wide field-of-view (FOV) and high-resolution phase reconstruction using a new reflection-mode Fourier ptychography (FP) algorithm; 2) enable 3D phase reconstruction based on a new reflection-mode multi-slice beam-propagation method (MS-BPM) model; and 3) investigate the utility of polarization sensitive contrast in both 2D and 3D.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>The goal of this project is to prototype a reflection-mode computational microscope to 1) provide wide field-of-view (FOV) and high-resolution phase reconstruction using a new reflection-mode Fourier ptychography (FP) algorithm; 2) enable 3D phase reconstruction based on a new reflection-mode multi-slice beam-propagation method (MS-BPM) model; and 3) investigate the utility of polarization sensitive contrast in [&hellip;]<\/p>\n","protected":false},"featured_media":0,"template":"","format":"standard","_links":{"self":[{"href":"https:\/\/www.bu.edu\/cise\/wp-json\/wp\/v2\/research\/36821"}],"collection":[{"href":"https:\/\/www.bu.edu\/cise\/wp-json\/wp\/v2\/research"}],"about":[{"href":"https:\/\/www.bu.edu\/cise\/wp-json\/wp\/v2\/types\/research"}],"version-history":[{"count":1,"href":"https:\/\/www.bu.edu\/cise\/wp-json\/wp\/v2\/research\/36821\/revisions"}],"predecessor-version":[{"id":36822,"href":"https:\/\/www.bu.edu\/cise\/wp-json\/wp\/v2\/research\/36821\/revisions\/36822"}],"wp:attachment":[{"href":"https:\/\/www.bu.edu\/cise\/wp-json\/wp\/v2\/media?parent=36821"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}