Optoelectronic Processing Facility Recipes

Research photo

The following are recipes to be used in the OPF Shared Laboratory. If you have questions or comments about these recipes, please contact the laboratory manager (information below). If you would like to submit a recipe, click here.

To return to the OPF main page, click here.

Address: 8 Saint Mary’s St., Room 816, Boston, MA 02215, Tel: (617) 358-2017
Lab Manager: Mr. Paul Mak, pmak@bu.edu

Recipe List (Alphabetical Listing)

Title/Version # Originator Effective Date
Acid Hood Procedure Using Buffered Oxide Etch 6:1 and Hydrofluoric Acid Paul Mak June 11, 2008
Cleanroom Gowning Protocol Helen Fawcett / Paul Mak Sep. 29, 2009
Mask Develop, Etch and Strip Procedure After Direct Write Xiaoyu “Rayne” Zheng / Paul Mak Nov. 8, 2007
Photolithography Procedure Using AZ4620 Mark Harrah / Paul Mak Nov. 9, 2007
Photolithography Procedure Using S1818 – 1.5 um Paul Mak April 29, 2010
Photolithography Procedure Using S1818 – 2.5 um Paul Mak April 29, 2010
Piranha Clean Procedure Paul Mak April 28, 2010
Piranha Clean using Hot Plate Procedure Paul Mak April 28, 2010
RCA Clean Procedure Paul Mak April 28, 2010