Photonics Center Professors Selim Unlu, Bennett Goldberg and John Connor have made...
Optoelectronic Processing Facility Recipes
The following are recipes to be used in the OPF Shared Laboratory. If you have questions or comments about these recipes, please contact the laboratory manager (information below). If you would like to submit a recipe, click here.
To return to the OPF main page, click here.
Address: 8 Saint Mary’s St., Room 816, Boston, MA 02215, Tel: (617) 358-2017
Lab Manager: Mr. Paul Mak, email@example.com
Recipe List (Alphabetical Listing)
|Title/Version #||Originator||Effective Date|
|Acid Hood Procedure Using Buffered Oxide Etch 6:1 and Hydrofluoric Acid||Paul Mak||June 11, 2008|
|Cleanroom Gowning Protocol||Helen Fawcett / Paul Mak||Sep. 29, 2009|
|Mask Develop, Etch and Strip Procedure After Direct Write||Xiaoyu “Rayne” Zheng / Paul Mak||Nov. 8, 2007|
|Photolithography Procedure Using AZ4620||Mark Harrah / Paul Mak||Nov. 9, 2007|
|Photolithography Procedure Using S1818 – 1.5 um||Paul Mak||April 29, 2010|
|Photolithography Procedure Using S1818 – 2.5 um||Paul Mak||April 29, 2010|
|Piranha Clean Procedure||Paul Mak||April 28, 2010|
|Piranha Clean using Hot Plate Procedure||Paul Mak||April 28, 2010|
|RCA Clean Procedure||Paul Mak||April 28, 2010|