Nanoscale Mechanical Engineering

A nanoscale fabrication sample

Professor Ekinci
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This facility is used to fabricate nanometer scale semiconductor mechanical devices using electron beam lithography, plasma, and wet etching techniques.

After fabrication, various state-of-the-art characterization techniques are employed to study the physical processes dominant in these nanomechanical devices.

Among the fundamental phenomena studied are dissipation, fluctuations, and surface effects at the nanometer length scales.

The practical aspects of this research involve the design and fabrication of ultra-high-speed nanomechanical sensors and development of surface nano-engineering techniques for improved device characteristics.