Laboratory for Microsystems Technology (LMST)

Professor Xin Zhang with grad student Shusen Huang.

Professor Xin Zhang
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Laboratory for Microsystems Technology (LMST) is dedicated to interdisciplinary research in the design, fabrication, characterization, packaging, and operation of Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS).

We perform research on MEMS and NEMS. Specifically, we are interested in applying materials science, micro/nanomechanics, and micro/nanomanufacturing technologies to solve various engineering problems that are motivated by practical applications in MEMS/NEMS and emerging nanobiotechnologies.

LMST is a Class 1000 cleanroom that provides resources for the design, fabrication, characterization, and testing of MEMS/NEMS devices. LMST is also a general biochemistry laboratory that has a strong collaboration with the Boston University School of Medicine.