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MICROSYSTEMS
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MEMS:
Micro-Electro-Mechanical
Systems (MEMS) promises to revolutionize nearly every product category
by bringing together silicon-based microelectronics with micromachining
technology, making possible the realization of complete systems-on-a-chip.
Fraunhofer has significant experience in developing microsystems
and smart products, augmenting the computational ability of microelectronics
with the perception and control capabilities of microsensors and
microactuators, and is extending their applications into biotechnology,
drug discovery, telecommunication, and infrared imaging.
Project
Examples:
-
Cell analysis and sorting chip for cancer study
- Uncooled
cantilever microbolometer array with mK temperature resolution
- Cryogenic
micropump for cooling satellite instrumentation
- Rapid
prototyping 3D multiplayer structures using a scanning laser system
- Nanoelectrode
array for ion channel study
- Dynamic
investigation of cell migration using a holographic nano-patterned
template
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