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MICROSYSTEMS / MEMS

 

MEMS

Micro-Electro-Mechanical Systems (MEMS) promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip. Fraunhofer has significant experience in developing microsystems and smart products, augmenting the computational ability of microelectronics with the perception and control capabilities of microsensors and microactuators, and is extending their applications into biotechnology, drug discovery, telecommunication, and infrared imaging.

Project Examples:

  • Cell analysis and sorting chip for cancer study
  • Uncooled cantilever microbolometer array with mK temperature resolution
  • Cryogenic micropump for cooling satellite instrumentation
  • Rapid prototyping 3D multiplayer structures using a scanning laser system
  • Nanoelectrode array for ion channel study
  • Dynamic investigation of cell migration using a holographic nano-patterned template
 
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