Vacuum Positioning System
Fraunhofer Center for Manufacturing Innovation
- © 2004 Fraunhofer CMI.
Small positioning table for in-vacuum, mass spectrometry measurements
- Developed compact, high precision sample positioning system
- Designed to operate under high vacuum conditions
- Minimized EMI and RFI to enhance measurement sensitivity
- Used vacuum-compatible materials, construction, and heat sinking
- Range of movement:
120 mm x 120 mm
- Positioning accuracy:
1 micron
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