ENG MS 778
The field of micro-electromechanical devices and systems (MEMS) has been growing at an exciting pace in recent years. The interdisciplinary nature of both micro-machining techniques and their applications can and does lead to exciting synergies. This course will explore the world of mostly silicon-based micro-machined transducers, i.e., micro-sensors and micro-actuators. This requires an awareness of material properties, fabrication technologies, basic structural mechanics, sensing and actuation principles, circuit and system issues, packaging, calibration, and testing. The material will be covered through a combination of lectures, case studies, individual homework assignments, and design projects carried out in teams.