Micromachined Tranducers

ENG MS 778

The field of micro-electromechanical devices and systems (MEMS) has been growing at an exciting pace in recent years. The interdisciplinary nature of both micro-machining techniques and their applications can and does lead to exciting synergies. This course will explore the world of mostly silicon-based micro-machined transducers, i.e., micro-sensors and micro-actuators. This requires an awareness of material properties, fabrication technologies, basic structural mechanics, sensing and actuation principles, circuit and system issues, packaging, calibration, and testing. The material will be covered through a combination of lectures, case studies, individual homework assignments, and design projects carried out in teams.

Note that this information may change at any time. Please visit the Student Link for the most up-to-date course information.