Materials Technology for Microelectronics
ENG MS 534
This course deals with the materials issues in microelectronics processing. Fundamental materials science concepts of bonding, electronic structure, crystal structure, defects, diffusion and phase diagrams are applied to key processing steps in microelectronics technology; including single crystal growth, lithography, thermal oxidation of Si, dopant diffusion, ion implantation, thin film deposition, etching and interconnect technology; as well as widely used microelectronics simulation software such as SUPREM. Materials challenges in emerging directions in micro and nanoelectronics, including silicon on insulator technology, Si-Ge strained layers, and quantum dots will also be addressed. 4 cr. summer and either sem.