Mat Tech Microe

ENG ME 534

This course deals with the materials issues in microelectronics processing. Fundamental materials science concepts of bonding, electronic structure, crystal structure, defects, and phase diagrams are applied to key processing steps in microelectronics technology. Also included are single crystal growth, lithography, thermal oxidation of Si, dopant diffusion, ion implantation, thin film deposition, etching and back-end processing: as well as widely used microelectronics software such as SUPREM.

Note that this information may change at any time. Please visit the Student Link for the most up-to-date course information.