Mat Tech Microe
ENG ME 534
This course deals with the materials issues in microelectronics processing. Fundamental materials science concepts of bonding, electronic structure, crystal structure, defects, and phase diagrams are applied to key processing steps in microelectronics technology. Also included are single crystal growth, lithography, thermal oxidation of Si, dopant diffusion, ion implantation, thin film deposition, etching and back-end processing: as well as widely used microelectronics software such as SUPREM.